¹ú²úÂ鶹¾«Æ·

Gridded DC Ion Sources

Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.

Gridded DC Ion Sources

Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.

Get stable power for ion source operation with Veeco’s SOLUSâ„¢ DC Ion Source Controller, featuring a state-of-the-art precision control…
Read more
A proven linear source for large/wide substrates or large substrate batches, Veeco’s gridded DC Ion Sources are ideal for…
Read more